10.6084/m9.figshare.8162645.v1
Rodrigo Amaral de Medeiro
Rodrigo Amaral de
Medeiro
Marcelo Silva Bortolini de Castro
Marcelo Silva Bortolini de
Castro
Leila Rosa de Oliveira Cruz
Leila Rosa de Oliveira
Cruz
Carlos Luiz Ferreira
Carlos Luiz
Ferreira
Comparative analysis of electrical properties of single and multilayers of VOx deposited by RF magnetron sputtering for bolometers application
SciELO journals
2019
VOX
RF magnetron sputtering
bolometric detectors
2019-05-22 02:46:12
Dataset
https://scielo.figshare.com/articles/dataset/Comparative_analysis_of_electrical_properties_of_single_and_multilayers_of_VOx_deposited_by_RF_magnetron_sputtering_for_bolometers_application/8162645
<p></p><p>ABSTRACT VOX thin films (single and multilayers) were fabricated by RF magnetron sputtering for application in bolometers. The samples were deposited without vacuum break from three targets: V2O3; VO2 and V2O5. A RF magnetron sputtering system with three cathodes was built to carry out the depositions. The results showed that both configurations, single layers and multilayers, presented similar values of TCR, roughly 2%/K, and sheet resistance less than 20 kΩ/sq, being recommended for application in bolometers.</p><p></p>