%0 Generic %A Medeiro, Rodrigo Amaral de %A Castro, Marcelo Silva Bortolini de %A Cruz, Leila Rosa de Oliveira %A Ferreira, Carlos Luiz %D 2019 %T Comparative analysis of electrical properties of single and multilayers of VOx deposited by RF magnetron sputtering for bolometers application %U https://scielo.figshare.com/articles/dataset/Comparative_analysis_of_electrical_properties_of_single_and_multilayers_of_VOx_deposited_by_RF_magnetron_sputtering_for_bolometers_application/8162645 %R 10.6084/m9.figshare.8162645.v1 %2 https://scielo.figshare.com/ndownloader/files/15210782 %2 https://scielo.figshare.com/ndownloader/files/15210785 %2 https://scielo.figshare.com/ndownloader/files/15210788 %2 https://scielo.figshare.com/ndownloader/files/15210791 %2 https://scielo.figshare.com/ndownloader/files/15210794 %2 https://scielo.figshare.com/ndownloader/files/15210797 %2 https://scielo.figshare.com/ndownloader/files/15210800 %K VOX %K RF magnetron sputtering %K bolometric detectors %X

ABSTRACT VOX thin films (single and multilayers) were fabricated by RF magnetron sputtering for application in bolometers. The samples were deposited without vacuum break from three targets: V2O3; VO2 and V2O5. A RF magnetron sputtering system with three cathodes was built to carry out the depositions. The results showed that both configurations, single layers and multilayers, presented similar values of TCR, roughly 2%/K, and sheet resistance less than 20 kΩ/sq, being recommended for application in bolometers.

%I SciELO journals