posted on 2019-05-22, 02:46authored byRodrigo Amaral de Medeiro, Marcelo Silva Bortolini de Castro, Leila Rosa de Oliveira Cruz, Carlos Luiz Ferreira
ABSTRACT VOX thin films (single and multilayers) were fabricated by RF magnetron sputtering for application in bolometers. The samples were deposited without vacuum break from three targets: V2O3; VO2 and V2O5. A RF magnetron sputtering system with three cathodes was built to carry out the depositions. The results showed that both configurations, single layers and multilayers, presented similar values of TCR, roughly 2%/K, and sheet resistance less than 20 kΩ/sq, being recommended for application in bolometers.